• Analog voltage output sensor that detects the acceleration of a moving object.
• Can be used for detecting acceleration information or measuring the slope angle for your devices.
• Device consists of a surface micro-machined capacitive sensing cell (g-cell)
• The g-cell is a mechanical structure formed from semiconductor materials ( polysilicon ) using semiconductor processes (masking and etching).• It can be modeled as a set of beams attached to a movable central mass that move between fixed beams.
• As the center beam moves with acceleration, the distance between the beams changes and each capacitor’s value changes.
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